Comparison ledger
ABM -407B-1-S-CES293 Robot, Edwards FL 20 K Foreline Trap, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FL 20 K Foreline TrapEdwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Edwards FL 20 K Foreline Trap |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Ambient operating temperature range | — | 0 to 50 °C[2] |
| Maximum internal pressure | — | 1 bar absolute, 1 x 10^5 Pa[2] |
| Mass | — | 1 kg[2] |
| Sorbent charge | — | 0.07 kg[2] |
| Leak tightness (1 bar differential) | — | 1 x 10^-6 mbar ls-1, 1 x 10^-4 Pa ls-1[2] |
| Trapping efficiency for oil mist | — | 99.7%[2] |
| Sorbent material | — | Activated alumina[3] |
| Body material | — | Cast aluminum[4] |
| Flange type | — | ISO KF25 (NW25)[4] |
| Dimensions (height x width) | — | 5.5 x 4 inches[4] |
| Weight | — | 1.5 lb[4] |
| Compatible pump models | — | RV3, RV5, RV8, RV12, E2M2, E2M5, E2M8, E2M12, E1M18, E2M18, E2M28, E2M30[5] |
| Rejuvenation method | — | Bake basket for 2 hours at 250-300 °C[2] |
| Part numbers | — | A13305000, A133-05-000, H026-00-050, H02600050[4] |
| Leak tightness | — | 1 x 10^-6 mbar l/s (1 x 10^-4 Pa l/s)[2] |
| Oil mist trapping efficiency | — | 99.7%[2] |
| Sorbent rejuvenation | — | Bake basket at 250 °C - 300 °C for 2 hours[2] |
| Fits pump models | — | RV3, RV5, RV8, RV12, E2M2, E2M5, E2M8, E2M12, E1M18, E2M18, E2M28, E2M30[4] |
| Inlet/Exhaust flanges | — | ISO KF25 (NW25)[4] |
| Dimensions | — | Height 5.5 inches, Width 4 inches[4] |
| Material | — | Cast Aluminum[4] |